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| Type | Manufacturer | Inventory Number | Name | Item number | Specifications/Description | Number | Unit |
| PECVD | NOVELLUS | 1 | Showerhead | 16-033932-00 | Showerhead，Pinned，150mm | 8 | Individual |
| PECVD | NOVELLUS | 2 | showerhead Fixings | 15-00043-02 | Adjuster，Ceramic，Gas Plate | 5 | Individual |
| PECVD | NOVELLUS | 3 | showerhead Fixings | 15-00027-02 | Guide，Nozzle Adjuster | 25 | Individual |
| PECVD | NOVELLUS | 4 | showerhead Fixed components (nuts) | 20-00212-00 | Nut，8-32 UNC-2B,Alum | 50 | Individual |
| PECVD | NOVELLUS | 5 | showerhead Fixings | 15-00309-00 | Hanger，Nozzle，1.33"（150mm） | 25 | Individual |
| PECVD | NOVELLUS | 6 | Feedthru Kit (Nut) | 15-00229-00 | Nut，Hex，1/2-20，Alum | 8 | Individual |
| PECVD | NOVELLUS | 7 | Feedthru Kit (gasket) | 15-00686-00 | Washer，Feedthru。1/2"ID，Alum | 8 | Individual |
| PECVD | NOVELLUS | 8 | Feedthru Kit (sealing ring) | 22-00021-01 | O-Ring，1.984"×0.139"，Buna | 8 | Individual |
| PECVD | NOVELLUS | 9 | Feedthru Kit (sealing ring) | 22-00391-00 | O-Ring，0.864"×0.070"，Viton | 8 | Individual |
| PECVD | NOVELLUS | 10 | Showerhead Feedthru | 15-00685-00 | Feedthru，3/8"O-Seal,UitraTorr | 8 | Individual |
| PECVD | NOVELLUS | 11 | Feedthru Kit (sealing ring) | 22-00344-00 | O-Ring, 0.364"×0.070",Viton | 8 | Individual |
| PECVD | NOVELLUS | 12 | 90° Gas distribution fixture (sealing ring) | 22-00345-00 | O-Ring, 0.362"×0.103",Viton | 24 | Individual |
| PECVD | NOVELLUS | 13 | Gas distribution disk kit (sealing ring) | 22-00239-00 | O-Ring, 5.984×0.139，Viton | 2 | Individual |
| PECVD | NOVELLUS | 14 | 90°Gas distribution fixture (ceramic tube) | 15-11606-00 | Insulator，Gas Dist，Ceramic | 8 | Individual |
| PECVD | NOVELLUS | 15 | Fork shaped shrapnel | 17-00148-00 | Spring，Fork | 8 | Individual |
| PECVD | NOVELLUS | 16 | spindle Fixed fork screw nickel | 15-00698-00 | Screw,Fork | 10 | Individual |
| PECVD | NOVELLUS | 17 | spindle Fixed screw nickel | 15-00399-05 | Screw, 1.12LG, Top Spindle | 5 | Individual |
| PECVD | NOVELLUS | 18 | spindle Fixed screw nickel | 15-00399-04 | Screw, 1.02LG, Top Spindle | 5 | Individual |
| PECVD | NOVELLUS | 19 | spindle Nickel screw washer | 15-00386-00 | Washer，Flat, #10, Nickel | 10 | Individual |
| PECVD | NOVELLUS | 20 | spindle Nickel screw washer | 15-00721-00 | Washer, #8, Nickel | 15 | Individual |
| PECVD | NOVELLUS | 21 | spindle Screw protection | 15-00951-00 | Cup, Screw Cover | 10 | Individual |
| PECVD | NOVELLUS | 22 | Heating wire length | 16-00098-00 | Wire, Insulated, Ceramic Bead, Long | 2 | Individual |
| PECVD | NOVELLUS | 23 | Short heating wire | 16-00092-00 | Wire, Insulated, Ceramic Bead, Short | 2 | Individual |
| PECVD | NOVELLUS | 24 | Triangular aluminum sheet | 17-00094-01 | Strap，LF Bias，Alum | 4 | Individual |
| PECVD | NOVELLUS | 25 | Assorted hot appetizers | 19-00155-01 | Heater Block Assy，Slotted，150mm | 1 | Individual |
| PECVD | NOVELLUS | 26 | Process chamber quartz observation window | 15-032014-00 | Window, Quartz, Etched | 2 | Individual |
| PECVD | NOVELLUS | 27 | Loadlock Chamber Door Sealing ring (small) | 22-00657-00 | O-ring, 7.975"×0.210", Kalrez | 1 | Individual |
| PECVD | NOVELLUS | 28 | Sealing ring at the connection between the process chamber and LL chamber | 22-00236-00 | O-ring, 7.45"×0.275", Viton, 150mm | 1 | Individual |
| PECVD | NOVELLUS | 29 | Sealing ring for process chamber observation window | 22-00234-00 | O-ring, 7.48"×0.139", Viton, 150mm | 2 | Individual |
| PECVD | NOVELLUS | 30 | Hot plate and heating wire fixing nut | 15-00385-00 | 6 | Individual | |
| PECVD | NOVELLUS | 31 | Hot plate and heating wire fixing screw | 15-00457-00 | 6 | Individual | |
| PECVD | NOVELLUS | 32 | Triangle aluminum sheet and heat plate fixing screw | 15-00341-00 | 6 | Individual | |
| PECVD | NOVELLUS | 33 | Triangular aluminum sheet and heat plate fixing screw gasket | 20-00222-00 | 6 | Individual | |
| PECVD | NOVELLUS | 34 | Flange, Keyed and Spindle fixing screws | 15-00399-03 | 5 | Individual | |
| PECVD | NOVELLUS | 35 | Clamp, Spindle Hub Mount and Hot Disk Fixing Screw | 15-00399-02 | 5 | Individual | |
| PECVD | NOVELLUS | 36 | TEOS INJECTOR | 10-00424-00 | 2 | Individual | |
| PECVD | NOVELLUS | 37 | 6"Arm | 15-01049-00 | Paddle，Dimple，150mm | 1 | Individual |
| PECVD | NOVELLUS | 38 | 6"Arm fixing components | 15-00486-00 | Bracket，Paddle，150mm | 1 | Individual |
| PECVD | NOVELLUS | 39 | Heating Feedthru Feedthru Assy, composed of electrical components | 19-00056-00 | Feedthru Assy,Electrical | 6 | Individual |
| PECVD | NOVELLUS | 40 | Heating feedhru nut protective cover (nickel) | 15-00311-00 | Nut，Cap，1/4-20，Ni | 6 | Individual |
| PECVD | NOVELLUS | 41 | Cassette | N/A | Customized | 3 | Individual |
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